Comprehensive nanoscopic analysis of tungsten carbide/Oxygenated-diamond contacts for Schottky barrier diodes

نویسندگان

چکیده

Tungsten carbide (WC) contacts deposited on oxygenated diamond surface have shown great importance in the field of diamond-based Schottky diodes. In previous works, high temperature stability up to 600 K, an ideality factor close 1 with a Barrier Height (SBH) ~1.5 eV been demonstrated by electrical measurements. Annealing at higher lead deterioration contact behaviour terms SBH and factor. The reaction between material or desorption oxygen interface has tentatively linked this phenomenon. work, composition WC/O-diamond interfaces annealed K are analysed X-ray photoelectron spectroscopy (XPS) depth profile low energy Ar+ ion sputtering for first time. microstructure is high-resolution transmission electron microscopy (HR-TEM). formation metastable cubic-WC phase presence evidenced. estimated XPS 1.6 ± 0.2 agreement I/V

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ژورنال

عنوان ژورنال: Applied Surface Science

سال: 2021

ISSN: ['1873-5584', '0169-4332']

DOI: https://doi.org/10.1016/j.apsusc.2020.147874